JPS61178635A - 波面収差測定用の干渉装置 - Google Patents

波面収差測定用の干渉装置

Info

Publication number
JPS61178635A
JPS61178635A JP60019443A JP1944385A JPS61178635A JP S61178635 A JPS61178635 A JP S61178635A JP 60019443 A JP60019443 A JP 60019443A JP 1944385 A JP1944385 A JP 1944385A JP S61178635 A JPS61178635 A JP S61178635A
Authority
JP
Japan
Prior art keywords
wavefront
converting
interference
forming
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60019443A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519927B2 (en]
Inventor
Minokichi Ban
箕吉 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60019443A priority Critical patent/JPS61178635A/ja
Priority to US06/825,596 priority patent/US4711576A/en
Publication of JPS61178635A publication Critical patent/JPS61178635A/ja
Publication of JPH0519927B2 publication Critical patent/JPH0519927B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP60019443A 1985-02-04 1985-02-04 波面収差測定用の干渉装置 Granted JPS61178635A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60019443A JPS61178635A (ja) 1985-02-04 1985-02-04 波面収差測定用の干渉装置
US06/825,596 US4711576A (en) 1985-02-04 1986-02-03 Wave front aberration measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60019443A JPS61178635A (ja) 1985-02-04 1985-02-04 波面収差測定用の干渉装置

Publications (2)

Publication Number Publication Date
JPS61178635A true JPS61178635A (ja) 1986-08-11
JPH0519927B2 JPH0519927B2 (en]) 1993-03-18

Family

ID=11999444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60019443A Granted JPS61178635A (ja) 1985-02-04 1985-02-04 波面収差測定用の干渉装置

Country Status (2)

Country Link
US (1) US4711576A (en])
JP (1) JPS61178635A (en])

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012440A (en) * 1989-03-01 1991-04-30 The United States Of America As Represented By The Director, National Security Agency Outer product optical interferometer with mask
US5020018A (en) * 1989-03-01 1991-05-28 The United States Of America As Represented By The Director Of National Security Agency Outer product optical interferometer with hologram
DE4006407C2 (de) * 1990-03-01 1995-06-08 Heidenhain Gmbh Dr Johannes Interferometrische Längen- oder Winkelmeßeinrichtung
JPH0519162A (ja) * 1991-05-02 1993-01-29 Asahi Optical Co Ltd 対物レンズ及び対物レンズの測定方法
GB9202691D0 (en) * 1992-02-08 1992-03-25 Renishaw Transducer Syst Straightness interferometer system
US5469261A (en) * 1994-04-05 1995-11-21 Carl Zeiss, Inc. Measurement of lens characteristics
SG94317A1 (en) * 1998-10-27 2003-02-18 Inst Data Storage Apparatus and method for laser beam splitting
US6619799B1 (en) 1999-07-02 2003-09-16 E-Vision, Llc Optical lens system with electro-active lens having alterably different focal lengths
US6712466B2 (en) 2001-10-25 2004-03-30 Ophthonix, Inc. Eyeglass manufacturing method using variable index layer
US6781681B2 (en) 2001-12-10 2004-08-24 Ophthonix, Inc. System and method for wavefront measurement
US7034949B2 (en) * 2001-12-10 2006-04-25 Ophthonix, Inc. Systems and methods for wavefront measurement
US6761454B2 (en) 2002-02-13 2004-07-13 Ophthonix, Inc. Apparatus and method for determining objective refraction using wavefront sensing
US20050174535A1 (en) * 2003-02-13 2005-08-11 Lai Shui T. Apparatus and method for determining subjective responses using objective characterization of vision based on wavefront sensing
US6952266B2 (en) * 2003-01-15 2005-10-04 Inlight Solutions, Inc. Interferometer alignment
WO2004065894A2 (en) * 2003-01-15 2004-08-05 Inlight Solutions, Inc. Optical path difference scanning interferometer
US7154658B2 (en) * 2005-04-08 2006-12-26 The Boeing Company Wavefront correction system
CN103293879B (zh) * 2013-06-20 2015-05-13 中国科学院苏州生物医学工程技术研究所 物镜波像差检测系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660529A (en) * 1979-10-05 1981-05-25 Reiner Josef Inspection device for refraction
JPS5764139A (en) * 1980-10-08 1982-04-19 Nippon Kogaku Kk <Nikon> Interferometer
JPS61128104A (ja) * 1984-11-27 1986-06-16 Ricoh Co Ltd 縞走査シアリング干渉計

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575248A (en) * 1984-06-18 1986-03-11 Itek Corporation Wavefront sensor employing novel D.C. shearing interferometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660529A (en) * 1979-10-05 1981-05-25 Reiner Josef Inspection device for refraction
JPS5764139A (en) * 1980-10-08 1982-04-19 Nippon Kogaku Kk <Nikon> Interferometer
JPS61128104A (ja) * 1984-11-27 1986-06-16 Ricoh Co Ltd 縞走査シアリング干渉計

Also Published As

Publication number Publication date
US4711576A (en) 1987-12-08
JPH0519927B2 (en]) 1993-03-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term